PREVIEW

... p manufacturing technology: lithography machine.

At present, there are two mainstream lithography machines on the market, one is DUV lithography machine and the other is EUV lithography machine. DUV is deep ultraviolet ( ), EUV is extremely deep ultraviolet ( ).

From the perspective of process range, DUV can basically only achieve 25n. Intel has achieved 10n by virtue of the dual-bench mode, but it cannot reach 10n.

Only EUV can meet the wafer manufacturing under 10n, and it ...

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